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Home Products Specialty Gas Equipment Flow Devices MFM 200 & MFC 202 Mass Flowmeters & Controllers

MFM 200 & MFC 202 Mass Flowmeters & Controllers

Modular, Clog-Resistant Design for Reliable and Accurate Mass Flow Control

WestAir offers the Concoa brand Mass Flowmeter (MFM) and Mass Flow Controller (MFC) Series which are based on a modular design. At the heart of each instrument is an insulated thermal transfer sensor which provides enhanced zero stability. This sensor is designed to virtually eliminate long downtime due to clogging. Additionally, the MFM/MFC design features an integral filter and an easily replaceable closed loop electronics card.

MFC 202 SHOWN IN PHOTO      

Features

  • ±1% Of full-scale accuracy*.
  • Proven reliability
  • Range–20,000 SCCM (N2 equivalent)
  • NIST traceable calibration

APPLICATIONS

  • Leak testing
  • Medical research
  • Vapor deposition
  • R&D and process flows
  • Semiconductor processes
  • Pollution monitoring
  • Gas blending
  • Chromatography

MFM 200 & MFC 202 Mass Flowmeters & Controllers Ordering Information

Part Number
  • MFM 200-2-10
  • MFM 200-2-100
  • MFM 200-2-500
  • MFM 200-2-1000
  • MFM 200-4-3L
  • MFM 200-4-5L
  • MFM 200-4-10L
  • MFM 200-4-20L
  • MFC 202-2-10
  • MFC 202-2-100
  • MFC 202-2-500
  • MFC 202-2-1000
  • MFC 202-4-3L
  • MFC 202-4-5L
  • MFC 202-4-10L
  • MFC 202-4-20L
Range NEFR
  • 0-10 SCCM
  • 0-100 SCCM
  • 0-500 SCCM
  • 0-1000 SCCM
  • 0-3 SLM
  • 0-5 SLM
  • 0-10 SLM
  • 0-20 SLM
  • 0-10 SCCM
  • 0-100 SCCM
  • 0-500 SCCM
  • 0-1000 SCCM
  • 0-3 SLM
  • 0-5 SLM
  • 0-10 SLM
  • 0-20 SLM
Tube Fitting
  • 1/8"
  • 1/8"
  • 1/8"
  • 1/8"
  • 1/4"
  • 1/4"
  • 1/4"
  • 1/4"
  • 1/8"
  • 1/8"
  • 1/8"
  • 1/8"
  • 1/4"
  • 1/4"
  • 1/4"
  • 1/4"

Specifications

MFM 200 SPECIFICATIONS

  • Accuracy* and Linearity#1% F.S.
  • Repeatability #0.05% F.S.
  • Standard Pressure Rating 500 PSIG (34 BAR)
  • Pressure Coefficient -0.0067%/PSI (0-1000 PSIG/0-70 BAR N2) typical
  • Leak Integrity <1×10-9 SCCS
  • Temperature Zero #0.035% FS/°C 0-60°C (0-140° F)|
  • Coefficient Span #0.0% RDG/°C 0-60°C (0-140° F)
  • STP 0°C and 760 TORR
  • Power #15 VDC @ $25 mA
  • Flow Signal (Inherently linear) 0-5.00 VDC
  • Wetted Material 316 stainless steel, Viton®, 82/18 Au/Ni braze, trace silver solder
  • Connector 15-pin subminiature D
  • Weight 1.8 lb (0.82 kg)

 

MFC 202 SPECIFICATIONS

  • Accuracy* and Linearity #1% F.S.
  • Repeatability £0.05% F.S.
  • Standard Pressure Rating 500 PSIG (34 BAR)
  • Pressure Coefficient -0.0067%/PSI (0-1000 PSIG/0-70 BAR N2) typical
  • Control Valve DP+ 15-65 PSIG (1-4.5 BAR)|
  • Leak Integrity <1×10-9 SCCS
  • Temperature Zero #0.035% FS/°C 0-60°C (0-140° F)
  • Coefficient Span #0.05% RDG/°C 0-60°C (0-140° F)
  • STP 0°C and 760 TORR
  • Power +15 VDC @ #60 mA/-185 mA
  • Flow Signal (Inherently linear) 0-5.00 VDC
  • Command Signal 0-500 VDC or 4-20 mA
  • Wetted Material 316 stainless steel, 302 stainless steel, nickel, Viton®, 82/18 Au/Ni Braze, trace silver solder, Kairez®
  • Connector 15-pin subminiature D
  • Weight 1.8 lb (0.82 kg)

MFM 200 & MFC 202 FITTINGS

  • 1/8″ tube fitting with nut 4.84 – DIM “A”: 4.84 (122.94
  • 1/4″ tube fitting with nut DIM “A”: 5.02 5.02 (127.51)

Dimensions

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